Niu Xiaoyan, Zheng Yang, Gu Yunlong, Chen Changming, Cai Zhenzhen, Shi Zuosen, Wang Fei, Sun Xiaoqiang, Cui Zhanchen, Zhang Daming
Appl Opt. 2014 Oct 10;53(29):6698-705. doi: 10.1364/AO.53.006698.
Novel thermo-optic waveguide gate switch arrays were designed and fabricated based on the direct UV-written technique. Highly fluorinated low-loss photopolymers and organic-inorganic grafting materials were used as the waveguide core and cladding, respectively. The low absorption loss characteristics and excellent thermal stabilities of the core and cladding materials were obtained. The rectangular waveguides and arrayed electrode heaters have been theoretically designed and numerically simulated to realize single-mode transmission. The propagation loss of a 4-μm-wide straight waveguide was measured as 0.15 dB/cm. The insertion loss of the device was directly measured to be about 5.5 dB. The rise and fall times of the device applied 100 Hz square-wave voltage were obtained as 1.068 and 1.245 ms, respectively. The switching power was about 9.2 mW, and the extinction ratio was 17.8 dB. The low-loss integrated switch arrays are suitable for realizing large-scale photonic integrated circuits.
基于直接紫外写入技术设计并制作了新型热光波导栅极开关阵列。分别使用高氟化低损耗光聚合物和有机-无机接枝材料作为波导芯层和包层。获得了芯层和包层材料的低吸收损耗特性以及优异的热稳定性。对矩形波导和阵列电极加热器进行了理论设计和数值模拟,以实现单模传输。测得4μm宽直波导的传播损耗为0.15dB/cm。直接测得该器件的插入损耗约为5.5dB。施加100Hz方波电压时,该器件的上升和下降时间分别为1.068ms和1.245ms。开关功率约为9.2mW,消光比为17.8dB。这种低损耗集成开关阵列适用于实现大规模光子集成电路。