Yue Jian, Wang Chunxue, Lin Hang, Ding Shuxiang, Shi Zuosen, Cui Zhanchen, Chen Changming, Zhang Daming
Opt Express. 2022 Apr 25;30(9):13931-13941. doi: 10.1364/OE.451063.
In this study, interlayer directional coupling (DC) thermo-optic (TO) waveguide switches were designed and fabricated using functionalized epoxy-crosslinking polymers. Fluorinated SU-8 (FSU-8) with a photo-initiating epoxy-crosslinking network was self-synthesized as a waveguide core material. A copolymer of methyl methacrylate and glycidyl methacrylate P(MMA-co-GMA) with a thermo-initiating epoxy crosslinking structure was self-synthesized as a waveguide cladding material. Compared with commercial pure SU-8 and PMMA, FSU-8 exhibited a lower absorption loss and P(MMA-co-GMA) exhibited a higher thermal stability. Using epoxy-crosslinking functionalized polymers, the structure of the waveguides and electrode heaters were optimized, and the performance parameters of the interlayer DC TO switches were simulated. At a signal wavelength of 1550 nm, the insertion loss, extinction ratio, and power consumption of the actual interlayer devices were measured as 6.7 dB, 15.6 dB, and 9 mW, respectively. The rising and falling response times of the TO switches were obtained as 631.6 µs and 362 µs, respectively. The self-leveling ability and solvent resistance characteristic of the epoxy-crosslinking network for FSU-8 and P(MMA-co-GMA) may guarantee the realization of interlayer DC TO waveguide switches. The proposed technique will be suitable for photonic integrated waveguide chips with multilayer stacking dynamic optical information interactions.
在本研究中,使用功能化环氧交联聚合物设计并制造了层间定向耦合(DC)热光(TO)波导开关。具有光引发环氧交联网络的氟化SU-8(FSU-8)被自合成作为波导芯材料。具有热引发环氧交联结构的甲基丙烯酸甲酯和甲基丙烯酸缩水甘油酯的共聚物P(MMA-co-GMA)被自合成作为波导包层材料。与市售纯SU-8和PMMA相比,FSU-8表现出更低的吸收损耗,而P(MMA-co-GMA)表现出更高的热稳定性。使用环氧交联功能化聚合物,优化了波导和电极加热器的结构,并模拟了层间DC TO开关的性能参数。在信号波长为1550 nm时,实际层间器件的插入损耗、消光比和功耗分别测量为6.7 dB、15.6 dB和9 mW。TO开关的上升和下降响应时间分别为631.6 µs和362 µs。FSU-8和P(MMA-co-GMA)的环氧交联网络的自流平能力和耐溶剂特性可以保证层间DC TO波导开关的实现。所提出的技术将适用于具有多层堆叠动态光学信息相互作用的光子集成波导芯片。