Duchamp Martial, Xu Qiang, Dunin-Borkowski Rafal E
1Ernst Ruska-Center for Microscopy and Spectroscopy with Electrons (ER-C) and Peter Grünberg Institute,Forschungszentrum Jülich,52428 Jülich,Germany.
2DENSsolutions,2628XH Delft,The Netherlands.
Microsc Microanal. 2014 Dec;20(6):1638-45. doi: 10.1017/S1431927614013476. Epub 2014 Nov 5.
A procedure based on focused ion beam milling and in situ lift-out is introduced for the preparation of high-quality specimens for in situ annealing experiments in the transmission electron microscope. The procedure allows an electron-transparent lamella to be cleaned directly on a heating chip using a low ion energy and back-side milling in order to minimize redeposition and damage. The approach is illustrated through the preparation of an Al-Mn-Fe complex metallic alloy specimen.
介绍了一种基于聚焦离子束铣削和原位取出的方法，用于制备高质量的样品，以便在透射电子显微镜中进行原位退火实验。该方法允许使用低离子能量和背面铣削在加热芯片上直接清洁电子透明薄片，以尽量减少再沉积和损伤。通过制备Al-Mn-Fe复合金属合金样品来说明该方法。
