Viollet Stéphane, Godiot Stéphanie, Leitel Robert, Buss Wolfgang, Breugnon Patrick, Menouni Mohsine, Juston Raphaël, Expert Fabien, Colonnier Fabien, L'Eplattenier Géraud, Brückner Andreas, Kraze Felix, Mallot Hanspeter, Franceschini Nicolas, Pericet-Camara Ramon, Ruffier Franck, Floreano Dario
Aix-Marseille Université, CNRS, UMR 7287 ISM, 13288 Marseille, France.
Aix-Marseille Université, CNRS, UMR 7346 CPPM, 13288 Marseille, France.
Sensors (Basel). 2014 Nov 17;14(11):21702-21. doi: 10.3390/s141121702.
The demand for bendable sensors increases constantly in the challenging field of soft and micro-scale robotics. We present here, in more detail, the flexible, functional, insect-inspired curved artificial compound eye (CurvACE) that was previously introduced in the Proceedings of the National Academy of Sciences (PNAS, 2013). This cylindrically-bent sensor with a large panoramic field-of-view of 180° × 60° composed of 630 artificial ommatidia weighs only 1.75 g, is extremely compact and power-lean (0.9 W), while it achieves unique visual motion sensing performance (1950 frames per second) in a five-decade range of illuminance. In particular, this paper details the innovative Very Large Scale Integration (VLSI) sensing layout, the accurate assembly fabrication process, the innovative, new fast read-out interface, as well as the auto-adaptive dynamic response of the CurvACE sensor. Starting from photodetectors and microoptics on wafer substrates and flexible printed circuit board, the complete assembly of CurvACE was performed in a planar configuration, ensuring high alignment accuracy and compatibility with state-of-the art assembling processes. The characteristics of the photodetector of one artificial ommatidium have been assessed in terms of their dynamic response to light steps. We also characterized the local auto-adaptability of CurvACE photodetectors in response to large illuminance changes: this feature will certainly be of great interest for future applications in real indoor and outdoor environments.
在软微型机器人这一具有挑战性的领域中,对可弯曲传感器的需求不断增加。在此,我们将更详细地介绍一种灵活、多功能、受昆虫启发的弯曲人造复眼(CurvACE),它曾在《美国国家科学院院刊》(PNAS,2013年)上发表过。这种圆柱形弯曲传感器由630个人造小眼组成,具有180°×60°的大视野全景,重量仅1.75克,极其紧凑且功耗低(0.9瓦),同时在五个数量级的照度范围内实现了独特的视觉运动传感性能(每秒1950帧)。特别是,本文详细介绍了创新的超大规模集成(VLSI)传感布局、精确的组装制造工艺、创新的新型快速读出接口,以及CurvACE传感器的自适应动态响应。从晶圆基板上的光电探测器和微光学器件以及柔性印刷电路板开始,CurvACE的完整组装以平面配置进行,确保了高对准精度以及与先进组装工艺的兼容性。已根据其对光阶跃的动态响应评估了一个人造小眼的光电探测器的特性。我们还表征了CurvACE光电探测器在响应大幅照度变化时的局部自适应性:这一特性对于未来在实际室内和室外环境中的应用无疑将具有极大的吸引力。