Biswas A, Sampathkumar R, Kumar Ajaya, Bhattacharyya D, Sahoo N K, Lagoo K D, Veerapur R D, Padmanabhan M, Puri R K, Bhattacharya Debarati, Singh Surendra, Basu S
Atomic & Molecular Physics Division, Bhabha Atomic Research Centre, Mumbai 400 085, India.
Division of Remote Handling & Robotics, Bhabha Atomic Research Centre, Mumbai 400 085, India.
Rev Sci Instrum. 2014 Dec;85(12):123103. doi: 10.1063/1.4902184.
Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å(-1) (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.
中子超镜和超镜偏振器是基于薄膜多层结构的装置，用于在各种基于中子的实验中反射和偏振中子。在本通讯中，描述了一种自行研发的9米长的在线直流溅射系统，该系统适用于在大尺寸（1500毫米×150毫米）基板上大量沉积中子超镜。还描述了钴和钛薄膜、钴/钛周期性多层膜以及非周期性超镜的沉积优化过程。该系统已用于沉积薄膜多层超镜偏振器，这些偏振器在高达约0.06 Å⁻¹的相当大的临界波矢转移（对应于m = 2.5，即天然镍临界波矢转移的2.5倍）时显示出高反射率。设计这些超镜的计算机代码也是自行开发的。
