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多层材料及其界面反射率和光谱椭偏测量数据分析中的自洽迭代程序。

Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered materials and their interfaces.

作者信息

Asmara T C, Santoso I, Rusydi A

机构信息

NUSNNI-NanoCore, Singapore Synchrotron Light Source, and Department of Physics, National University of Singapore, Singapore 117576.

出版信息

Rev Sci Instrum. 2014 Dec;85(12):123116. doi: 10.1063/1.4897487.

DOI:10.1063/1.4897487
PMID:25554281
Abstract

For multilayered materials, reflectivity depends on the complex dielectric function of all the constituent layers, and a detailed analysis is required to separate them. Furthermore, for some cases, new quantum states can occur at the interface which may change the optical properties of the material. In this paper, we discuss various aspects of such analysis, and present a self-consistent iteration procedure, a versatile method to extract and separate the complex dielectric function of each individual layer of a multilayered system. As a case study, we apply this method to LaAlO3/SrTiO3 heterostructure in which we are able to separate the effects of the interface from the LaAlO3 film and the SrTiO3 substrate. Our method can be applied to other complex multilayered systems with various numbers of layers.

摘要

对于多层材料,反射率取决于所有组成层的复介电函数,需要进行详细分析以将它们区分开。此外,在某些情况下,界面处可能会出现新的量子态,这可能会改变材料的光学性质。在本文中,我们讨论了此类分析的各个方面,并提出了一种自洽迭代程序,这是一种用于提取和分离多层系统中各层复介电函数的通用方法。作为一个案例研究,我们将此方法应用于LaAlO3/SrTiO3异质结构,在其中我们能够将界面的影响与LaAlO3薄膜和SrTiO3衬底的影响区分开。我们的方法可应用于具有不同层数的其他复杂多层系统。

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Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered materials and their interfaces.多层材料及其界面反射率和光谱椭偏测量数据分析中的自洽迭代程序。
Rev Sci Instrum. 2014 Dec;85(12):123116. doi: 10.1063/1.4897487.
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