Cooper Peter A, Carpenter Lewis G, Mennea Paolo L, Holmes Christopher, Gates James C, Smith Peter G R
Opt Express. 2014 Dec 29;22(26):31801-13. doi: 10.1364/OE.22.031801.
A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.
已展示出一种双悬臂装置，它可以用作力传感器或可变衰减器。该装置采用物理微加工技术制造，不需要洁净室级别的设施。测量了该装置对机械驱动的响应，并表明其可以用传统的光纤角度失准理论很好地描述。该装置有潜力用于集成光学元件中的传感器或衰减器。制造了一系列具有并行操作潜力的装置。
