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一种简单紧凑的与超高真空和高磁场兼容的惯性纳米定位器。

A simple compact UHV and high magnetic field compatible inertial nanopositioner.

作者信息

Pang Zongqiang, Li Xiang, Xu Lei, Rong Zhou, Liu Ruilan

机构信息

College of Automation, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210003, People's Republic of China.

出版信息

Rev Sci Instrum. 2015 Jan;86(1):013704. doi: 10.1063/1.4904846.

DOI:10.1063/1.4904846
PMID:25638087
Abstract

We present a novel simple piezoelectric nanopositioner which just has one piezoelectric scanner tube (PST) and one driving signal, using two short quartz rods and one BeCu spring which form a triangle to press the central shaft and can promise the nanopositioner's rigidity. Applying two pulse inverted voltage signals on the PST's outer and inner electrodes, respectively, according to the principle of piezoelectricity, the PST will elongate or contract suddenly while the central shaft will keep stationary for its inertance, so the central shaft will be sliding a distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly, the central shaft will move upward or downward one step. The heavier of the central shaft, the better moving stability, so the nanopositioner has high output force. Due to its compactness and mechanical stability, it can be easily implanted into some extreme conditions, such as ultrahigh vacuum, ultralow temperature, and high magnetic field.

摘要

我们展示了一种新颖的简单压电纳米定位器,它只有一个压电扫描管(PST)和一个驱动信号,使用两根短石英棒和一个铍铜弹簧,它们形成一个三角形来挤压中心轴,并能保证纳米定位器的刚性。根据压电原理,分别在PST的外电极和内电极上施加两个脉冲反向电压信号,PST会突然伸长或收缩,而中心轴由于其惯性将保持静止,因此中心轴将相对于石英棒和弹簧滑动一段距离,然后缓慢撤去脉冲电压,中心轴将向上或向下移动一步。中心轴越重,移动稳定性越好,因此该纳米定位器具有高输出力。由于其紧凑性和机械稳定性,它可以很容易地植入一些极端条件下,如超高真空、超低温度和高磁场环境。

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