Touqeer Muhammad, Maqbool Syed Asad, Esmaeilzadeh Behnam, Zheng Shaofeng, Meng Wenjie, Abas Asim, Wang Jihao, Feng Qiyuan, Hou Yubin, Lu Qingyou
High Magnetic Field Laboratory, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei, Anhui 230031, China.
University of Science and Technology of China, Hefei 230026, People's Republic of China.
Rev Sci Instrum. 2024 Aug 1;95(8). doi: 10.1063/5.0217705.
We introduce a novel piezoelectric stepper motor featuring high compactness, rigidity, and any direction operability. Here, not only is the structure of high novelty but also the working principle very simple. The piezo stacks unit is sandwiched between two spring finger pieces, with almost equal clamping forces applied between the top of the piezo stacks' unit and the spring finger piece. Applying individual driving signals to each of the five piezo stack pairs, causing deformation one by one in the same direction, followed by simultaneous recovery in the reverse direction, enables movement of the frame part. The optimized clamping force of the piezoelectric stack units and spring fingers ensures maximum output force. The motor's operational capability at low threshold voltages, specifically 8 V for downward movement and 10 V for upward movement, confirmed its efficacy in both vertical and horizontal directions. The motor's operational capability at a low threshold voltage of 10 V confirmed its efficacy in both vertical and horizontal directions. At room temperature, step size ranges from 0.3 to 7.4 µm at 20 Hz frequency and varying driving voltage from 10 to 180 V. It has a maximum travel range of about 5 mm and can lift a maximum load of 220 g in an upward direction, so the maximum output force generated by this motor is 2.2 N. The compact and rigid design is capable of building an atomically resolved scanning probe microscope, and its working ability has the potential to use the cleavage of different types of samples in limited space environments, such as the small-bore superconducting magnet and low temperature.
我们推出了一种新型压电步进电机，具有高紧凑性、高刚性和全方位可操作性。在此，不仅结构极具新颖性，而且工作原理非常简单。压电堆栈单元夹在两个弹簧指状片之间，在压电堆栈单元顶部与弹簧指状片之间施加几乎相等的夹紧力。向五对压电堆栈中的每一对施加单独的驱动信号，使其在同一方向上逐个变形，随后在相反方向上同时恢复，从而使框架部分能够移动。压电堆栈单元和弹簧指的优化夹紧力确保了最大输出力。该电机在低阈值电压下的运行能力，具体而言，向下移动时为8V，向上移动时为10V，证实了其在垂直和水平方向上的有效性。该电机在10V的低阈值电压下的运行能力证实了其在垂直和水平方向上的有效性。在室温下，在20Hz频率和10至180V变化的驱动电压下，步长范围为0.3至7.4μm。它的最大行程约为5mm，向上可提升最大负载220g，因此该电机产生的最大输出力为2.2N。这种紧凑且刚性的设计能够构建原子分辨率扫描探针显微镜，其工作能力有潜力在有限的空间环境中，如小口径超导磁体和低温环境下，对不同类型的样品进行切割。
