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Rapid thermal processing chamber for in-situ x-ray diffraction.

作者信息

Ahmad Md Imteyaz, Van Campen Douglas G, Fields Jeremy D, Yu Jiafan, Pool Vanessa L, Parilla Philip A, Ginley David S, Van Hest Maikel F A M, Toney Michael F

机构信息

SSRL, SLAC National Accelerator Laboratory, 2575, Sand Hill Road, Menlo Park, California 94025, USA.

National Renewable Energy Laboratory, Golden, Colorado 80401, USA.

出版信息

Rev Sci Instrum. 2015 Jan;86(1):013902. doi: 10.1063/1.4904848.

DOI:10.1063/1.4904848
PMID:25638092
Abstract

Rapid thermal processing (RTP) is widely used for processing a variety of materials, including electronics and photovoltaics. Presently, optimization of RTP is done primarily based on ex-situ studies. As a consequence, the precise reaction pathways and phase progression during the RTP remain unclear. More awareness of the reaction pathways would better enable process optimization and foster increased adoption of RTP, which offers numerous advantages for synthesis of a broad range of materials systems. To achieve this, we have designed and developed a RTP instrument that enables real-time collection of X-ray diffraction data with intervals as short as 100 ms, while heating with ramp rates up to 100 °Cs(-1), and with a maximum operating temperature of 1200 °C. The system is portable and can be installed on a synchrotron beamline. The unique capabilities of this instrument are demonstrated with in-situ characterization of a Bi2O3-SiO2 glass frit obtained during heating with ramp rates 5 °C s(-1) and 100 °C s(-1), revealing numerous phase changes.

摘要

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