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大面积合成单层二硫化钨及其环境敏感型光探测性能。

Large-area synthesis of monolayer WS₂ and its ambient-sensitive photo-detecting performance.

作者信息

Lan Changyong, Li Chun, Yin Yi, Liu Yong

机构信息

State Key Laboratory of Electronic Thin Film and Integrated Device, School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, 610054, China.

出版信息

Nanoscale. 2015 Apr 14;7(14):5974-80. doi: 10.1039/c5nr01205h.

Abstract

We demonstrate the synthesis of large-area monolayer WS2 films by chemical vapor deposition (CVD) and investigate their photoresponse properties by fabricating n-type field effect transistors (FETs) with Al as the ohmic contact. Our CVD-grown monolayer WS2 shows an electron mobility of 0.91 cm(2) V(-1) s(-1) and an ON/OFF ratio of 10(6), indicating its comparable electronic properties to the mechanically exfoliated flake sample. In a vacuum, by applying a gate bias (60 V), the responsivity of the monolayer WS2 phototransistor can increase up to 22.1 A W(-1) and a decent sub-second level response time can be maintained. In contrast, in air, it shows a very fast response time of less than 4.5 ms, but at the cost of responsivity reduction to 0.24 mA W(-1). Such a distinctive ambient-sensitive photo-detecting performance can be well-explained by the pronounced effect of charge-acceptor-like O2/H2O molecule adsorption/desorption on the photocarrier transport. Our CVD-grown high quality monolayer WS2 may pave the way for developing industrial-scale optoelectronic devices for photo-detecting and chemical sensing applications. [Corrected]

摘要

我们通过化学气相沉积(CVD)展示了大面积单层WS2薄膜的合成,并通过制备以Al作为欧姆接触的n型场效应晶体管(FET)来研究其光响应特性。我们通过CVD生长的单层WS2表现出0.91 cm² V⁻¹ s⁻¹的电子迁移率和10⁶的开/关比,表明其电子特性与机械剥离的薄片样品相当。在真空中,通过施加60 V的栅极偏压,单层WS2光电晶体管的响应度可提高到22.1 A W⁻¹,并且可以维持良好的亚秒级响应时间。相比之下,在空气中,它显示出小于4.5 ms的非常快的响应时间,但代价是响应度降低到0.24 mA W⁻¹。电荷受体样O2/H2O分子吸附/解吸对光载流子传输的显著影响可以很好地解释这种独特的环境敏感型光探测性能。我们通过CVD生长的高质量单层WS2可能为开发用于光探测和化学传感应用的工业规模光电器件铺平道路。[已校正]

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