Wang Zheng, Yan Hai, Chakravarty Swapnajit, Subbaraman Harish, Xu Xiaochuan, Fan D L, Wang Alan X, Chen Ray T
Opt Lett. 2015 Apr 1;40(7):1563-6. doi: 10.1364/OL.40.001563.
Traditional silicon waveguides are defined by waveguide trenches on either side of the high-index silicon core that leads to fluid leakage orifices for over-layed microfluidic channels. Closing the orifices needs additional fabrication steps which may include oxide deposition and planarization. We experimentally demonstrated a new type of microfluidic channel design with ultralow-loss waveguide crossings (0.00248 dB per crossings). The waveguide crossings and all other on-chip passive-waveguide components are fabricated in one step with no additional planarization steps which eliminates any orifices and leads to leak-free fluid flow. Such designs are applicable in all optical-waveguide-based sensing applications where the analyte must be flowed over the sensor. The new channel design was demonstrated in a L55 photonic crystal sensor operating between 1540 and 1580 nm.
传统的硅波导由高折射率硅芯两侧的波导沟槽定义，这些沟槽会导致用于上层微流体通道的流体泄漏孔。封闭这些孔需要额外的制造步骤，这可能包括氧化物沉积和平面化。我们通过实验展示了一种新型微流体通道设计，其具有超低损耗的波导交叉（每个交叉点0.00248 dB）。波导交叉点和所有其他片上无源波导组件在一步中制造完成，无需额外的平面化步骤，这消除了任何泄漏孔并实现了无泄漏的流体流动。这种设计适用于所有基于光波导的传感应用，在这些应用中，分析物必须流过传感器。这种新型通道设计在工作于1540至1580 nm的L55光子晶体传感器中得到了验证。
