Ahn Dahoon, Choi Young-Man, Jeong Jaehwa
High-Speed Railroad System Research Center, KRRI, 176 Cheoldobangmulgwan-ro, Uiwang-si, Gyeonggi-do 437-757, South Korea.
Printed Electronics Laboratory, KIMM, 156 Gajeongbuk-ro, Yuseong-gu, Daejon 305-343, South Korea.
Rev Sci Instrum. 2015 Mar;86(3):035101. doi: 10.1063/1.4908128.
Positioning devices are widely used in industrial applications. High precision is a key performance of the positioner and recently high precision positioners for advanced applications are required to satisfy other performances such as larger motion range, nanometer level precision, and multiple degree-of-freedom (DOF) motion within compact size. We propose a new 4-DOF high-precision positioner employing voice coil motors and flexure guides. Millimeter motion range and nano level resolution were achieved simultaneously, utilizing the frictionless characteristic of the voice coil motors and the flexures. The mathematical model describing static and dynamic behaviors of the positioner was developed and the design parameters were optimized to achieve the best performances. The proposed positioner was manufactured with the size of 180 × 180 × 30.7 mm(3) which was very compact. The experiment of feedback control showed the motion range more than 1.80 × 1.80 mm(2) in-plane and 0.3 mm vertically and the minimum resolution of 10 nm in-plane and 14 nm vertically.
定位装置在工业应用中被广泛使用。高精度是定位器的关键性能，近来，先进应用中的高精度定位器需要满足其他性能要求，如更大的运动范围、纳米级精度以及在紧凑尺寸内的多自由度（DOF）运动。我们提出了一种采用音圈电机和柔性导轨的新型四自由度高精度定位器。利用音圈电机和柔性部件的无摩擦特性，同时实现了毫米级的运动范围和纳米级的分辨率。建立了描述定位器静态和动态行为的数学模型，并对设计参数进行了优化以实现最佳性能。所提出的定位器制造尺寸为180×180×30.7 mm³，非常紧凑。反馈控制实验表明，其平面内运动范围超过1.80×1.80 mm²，垂直方向为0.3 mm，平面内最小分辨率为10 nm，垂直方向为14 nm。
