Urness Adam C, Anderson Ken, Ye Chungfang, Wilson William L, McLeod Robert R
Opt Express. 2015 Jan 12;23(1):264-73. doi: 10.1364/OE.23.000264.
We introduce a maskless lithography tool and optically-initiated diffusive photopolymer that enable arbitrary two-dimensional gradient index (GRIN) polymer lens profiles. The lithography tool uses a pulse-width modulated deformable mirror device (DMD) to control the 8-bit gray-scale intensity pattern on the material. The custom polymer responds with a self-developing refractive index profile that is non-linear with optical dose. We show that this nonlinear material response can be corrected with pre-compensation of the intensity pattern to yield high fidelity, optically induced index profiles. The process is demonstrated with quadratic, millimeter aperture GRIN lenses, Zernike polynomials and GRIN Fresnel lenses.
我们介绍了一种无掩膜光刻工具和光引发扩散光聚合物,它们能够实现任意二维梯度折射率(GRIN)聚合物透镜轮廓。该光刻工具使用脉宽调制变形镜器件(DMD)来控制材料上的8位灰度强度图案。定制聚合物会产生与光学剂量呈非线性关系的自显影折射率轮廓。我们表明,这种非线性材料响应可以通过强度图案的预补偿来校正,以产生高保真度的光学诱导折射率轮廓。通过二次型、毫米孔径GRIN透镜、泽尼克多项式和GRIN菲涅耳透镜演示了该过程。