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金属超短脉冲扫描激光烧蚀中的热积累。

Heat accumulation in ultra-short pulsed scanning laser ablation of metals.

作者信息

Bauer Franziska, Michalowski Andreas, Kiedrowski Thomas, Nolte Stefan

出版信息

Opt Express. 2015 Jan 26;23(2):1035-43. doi: 10.1364/OE.23.001035.

Abstract

High average laser powers can have a serious adverse impact on the ablation quality in ultra-short pulsed laser material processing of metals. With respect to the scanning speed, a sharp transition between a smooth, reflective and an uneven, dark ablated surface is observed. Investigating the influence of the sample temperature, it is experimentally shown that this effect stems from heat accumulation. In a numerical heat flow simulation, the critical scanning speed indicating the change in ablation quality is determined in good agreement with the experimental data.

摘要

在金属的超短脉冲激光材料加工中,高平均激光功率会对烧蚀质量产生严重的不利影响。关于扫描速度,观察到在光滑、反光的表面和不平、暗黑的烧蚀表面之间存在明显的转变。通过研究样品温度的影响,实验表明这种效应源于热积累。在数值热流模拟中,确定了表明烧蚀质量变化的临界扫描速度,其与实验数据吻合良好。

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