Shin Sungkwon, Kim Jaeyong
DE&T Co., Ltd., 40-56, Gajangsaneopseobuk-Ro, Osan-Si, Gyenggi-Do, 18103, Republic of Korea.
Sci Rep. 2025 Feb 13;15(1):5418. doi: 10.1038/s41598-025-89493-0.
This article presents high-efficiency ablation of aluminum using femtosecond laser processing with a pulse duration of 300 fs and a laser wavelength of 1035 nm. A series of stationary irradiation experiments were conducted at repetition rates f = 50 kHz, 100 kHz, 200 kHz, 500 kHz, and 1 MHz. The comparison results indicated that as the repetition rate increased above a laser fluence F ≈ 1 J/cm, the ablation rate ΔL decreased. This phenomenon could be attributed to particle shielding, which occurs as the density of particles increases with increasing the volume of ablated targets, corresponding to an increase in F. The volume ablation rate ΔV was obtained in 0.53 ≤ F ≤ 2.59 J/cm at f = 100 kHz, revealing that ΔV at F = 2.59 J/cm was ~ 3.4 times higher than that at F = 1 J/cm. Multibeam laser processing, utilizing a diffractive optical element, was employed to reduce f, thereby suppressing particle shielding while preserving the total laser fluence and scan speed. The experimental groove shapes were accurately estimated using a developed analytical model. These findings provide valuable insights for achieving high-efficiency laser cutting of aluminum in the realm of secondary battery manufacturing.
本文介绍了使用脉冲持续时间为300飞秒、激光波长为1035纳米的飞秒激光加工对铝进行高效烧蚀。在重复频率f = 50千赫、100千赫、200千赫、500千赫和1兆赫下进行了一系列固定辐照实验。比较结果表明,当重复频率在激光能量密度F≈1焦/平方厘米以上增加时,烧蚀速率ΔL降低。这种现象可归因于粒子屏蔽,随着烧蚀靶材体积增加,粒子密度增大,对应F增加,从而发生粒子屏蔽。在f = 100千赫时,在0.53≤F≤2.59焦/平方厘米范围内获得了体积烧蚀速率ΔV,结果表明F = 2.59焦/平方厘米时的ΔV比F = 1焦/平方厘米时高约3.4倍。采用利用衍射光学元件的多光束激光加工来降低f,从而在保持总激光能量密度和扫描速度的同时抑制粒子屏蔽。使用开发的分析模型准确估计了实验凹槽形状。这些发现为二次电池制造领域实现铝的高效激光切割提供了有价值见解。