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在籽晶a面蓝宝石上低温水热生长的ZnO薄膜具有高电子迁移率和低载流子浓度。

High electron mobility and low carrier concentration of hydrothermally grown ZnO thin films on seeded a-plane sapphire at low temperature.

作者信息

Jayah Nurul Azzyaty, Yahaya Hafizal, Mahmood Mohamad Rusop, Terasako Tomoaki, Yasui Kanji, Hashim Abdul Manaf

机构信息

Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Jalan Sultan Yahya Petra, Kuala Lumpur, 54100 Malaysia.

Faculty of Electrical Engineering, Universiti Teknologi MARA, Shah Alam, Selangor 40450 Malaysia.

出版信息

Nanoscale Res Lett. 2015 Jan 22;10:7. doi: 10.1186/s11671-014-0715-0. eCollection 2015.

DOI:10.1186/s11671-014-0715-0
PMID:25852306
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4312313/
Abstract

Hydrothermal zinc oxide (ZnO) thick films were successfully grown on the chemical vapor deposition (CVD)-grown thick ZnO seed layers on a-plane sapphire substrates using the aqueous solution of zinc nitrate dehydrate (Zn(NO3)2). The use of the CVD ZnO seed layers with the flat surfaces seems to be a key technique for obtaining thick films instead of vertically aligned nanostructures as reported in many literatures. All the hydrothermal ZnO layers showed the large grains with hexagonal end facets and were highly oriented towards the c-axis direction. Photoluminescence (PL) spectra of the hydrothermal layers were composed of the ultraviolet (UV) emission (370 to 380 nm) and the visible emission (481 to 491 nm), and the intensity ratio of the former emission (I UV) to the latter emission (I VIS) changed, depending on both the molarity of the solution and temperature. It is surprising that all the Hall mobilities for the hydrothermal ZnO layers were significantly larger than those for their corresponding CVD seed films. It was also found that, for the hydrothermal films grown at 70°C to 90°C, the molarity dependences of I UV/I VIS resembled those of mobilities, implying that the mobility in the film is affected by the structural defects. The highest mobility of 166 cm(2)/Vs was achieved on the hydrothermal film with the carrier concentration of 1.65 × 10(17) cm(-3) grown from the aqueous solution of 40 mM at 70°C.

摘要

采用硝酸锌（Zn(NO3)2）水溶液，在a面蓝宝石衬底上化学气相沉积（CVD）生长的厚ZnO籽晶层上成功生长出了水热氧化锌（ZnO）厚膜。如许多文献报道，使用具有平坦表面的CVD ZnO籽晶层似乎是获得厚膜而非垂直排列纳米结构的关键技术。所有水热ZnO层均呈现出具有六边形端面的大晶粒，且高度取向于c轴方向。水热层的光致发光（PL）光谱由紫外（UV）发射（370至380nm）和可见发射（481至491nm）组成，前一种发射（I UV）与后一种发射（I VIS）的强度比随溶液摩尔浓度和温度而变化。令人惊讶的是，所有水热ZnO层的霍尔迁移率均显著高于其相应的CVD籽晶膜。还发现，对于在70°C至90°C生长的水热膜，I UV/I VIS的摩尔浓度依赖性与迁移率的依赖性相似，这意味着膜中的迁移率受结构缺陷的影响。在70°C下由40mM水溶液生长的载流子浓度为1.65×10(17) cm(-3)的水热膜上，实现了166 cm(2)/Vs的最高迁移率。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/00f1987202cd/11671_2014_715_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/fb6788a6d473/11671_2014_715_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/20ece1ff8a2c/11671_2014_715_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/67d14190eb19/11671_2014_715_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/1428e7134997/11671_2014_715_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/3ac6049d3091/11671_2014_715_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/1b602ff8bf7e/11671_2014_715_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/05435fea61fd/11671_2014_715_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/8fd888a349e2/11671_2014_715_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/00f1987202cd/11671_2014_715_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/fb6788a6d473/11671_2014_715_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/20ece1ff8a2c/11671_2014_715_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/67d14190eb19/11671_2014_715_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/1428e7134997/11671_2014_715_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/3ac6049d3091/11671_2014_715_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/1b602ff8bf7e/11671_2014_715_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/05435fea61fd/11671_2014_715_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/8fd888a349e2/11671_2014_715_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a86e/4312313/00f1987202cd/11671_2014_715_Fig9_HTML.jpg

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