Rose Max, Skopintsev Petr, Dzhigaev Dmitry, Gorobtsov Oleg, Senkbeil Tobias, von Gundlach Andreas, Gorniak Thomas, Shabalin Anatoly, Viefhaus Jens, Rosenhahn Axel, Vartanyants Ivan
Deutsches Elektronen-Synchrotron DESY, Notkestrasse 85, 22607 Hamburg, Germany.
Analytical Chemistry - Biointerfaces, Ruhr University Bochum, Universitätsstrasse 150, 44780 Bochum, Germany.
J Synchrotron Radiat. 2015 May;22(3):819-27. doi: 10.1107/S1600577515005524. Epub 2015 Apr 23.
A ptychographical coherent diffractive imaging experiment in the water window with focused soft X-rays at 500 eV is reported. An X-ray beam with high degree of coherence was selected for ptychography at the P04 beamline of PETRA III synchrotron radiation source. The beam coherence was measured with the newly developed non-redundant array method, and a coherence length of 4.1 µm and global degree of coherence of 35% at 100 µm exit slit opening in the vertical direction were determined. A pinhole, 2.6 µm in size, selected the coherent part of the beam that was used to obtain ptychographic reconstruction results of a lithographically manufactured test sample and a fossil diatom. The achieved resolution was 53 nm for the test sample and was only limited by the size of the detector. The diatom was imaged at a resolution better than 90 nm.
报道了在水窗中使用500 eV聚焦软X射线进行的叠层相干衍射成像实验。在PETRA III同步辐射源的P04光束线上选择了具有高度相干性的X射线束用于叠层成像。采用新开发的非冗余阵列方法测量了光束相干性，确定在垂直方向100 µm出射狭缝开口处的相干长度为4.1 µm，全局相干度为35%。一个尺寸为2.6 µm的针孔选择了光束的相干部分，用于获得光刻制造的测试样品和化石硅藻的叠层重建结果。测试样品实现的分辨率为53 nm，且仅受探测器尺寸限制。硅藻成像的分辨率优于90 nm。
