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基于激光反馈干涉测量法的材料热膨胀系数非接触测量研究。

Study of non-contact measurement of the thermal expansion coefficients of materials based on laser feedback interferometry.

作者信息

Zheng Fasong, Tan Yidong, Lin Jing, Ding Yingchun, Zhang Shulian

机构信息

The State Key Lab of Precision Measurement Technology and Instrument, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.

Departments of Physics, College of Science, Beijing University of Chemical Technology, Beijing 100029, China.

出版信息

Rev Sci Instrum. 2015 Apr;86(4):043109. doi: 10.1063/1.4917554.

Abstract

The noncooperative and ultrahigh sensitive length measurement approach is of great significance to the study of a high-precision thermal expansion coefficient (TEC) determination of materials at a wide temperature range. The novel approach is presented in this paper based on the Nd:YAG microchip laser feedback interferometry with 1064 nm wavelength, the beam frequency of which is shifted by a pair of acousto-optic modulators and then the heterodyne phase measurement technique is used. The sample is placed in a muffle furnace with two coaxial holes opened on the opposite furnace walls. The measurement beams are perpendicular and coaxial on each surface of the sample, the configuration which can not only achieve the length measurement of sample but also eliminate the influence of the distortion of the sample supporter. The reference beams inject on the reference mirrors which are put as possible as near the holes, respectively, to eliminate the air disturbances and the influence of thermal lens effect out of the furnace chamber. For validation, the thermal expansion coefficients of aluminum and steel 45 samples are measured from room temperature to 748 K, which proved measurement repeatability of TECs is better than 0.6 × 10(-6)(K(-1)) at the range of 298 K-598 K and the high-sensitive non-contact measurement of the low reflectivity surface induced by the oxidization of the samples at the range of 598 K-748 K.

摘要

这种非合作式超高灵敏度长度测量方法对于在宽温度范围内高精度测定材料的热膨胀系数(TEC)具有重要意义。本文提出了一种基于波长为1064 nm的Nd:YAG微芯片激光反馈干涉测量法的新方法,其光束频率由一对声光调制器进行移频,然后采用外差相位测量技术。样品置于马弗炉中,炉壁相对处开有两个同轴孔。测量光束在样品的每个表面上相互垂直且同轴,这种配置不仅可以实现样品长度的测量,还能消除样品支撑物变形的影响。参考光束分别注入尽可能靠近孔放置的参考镜上,以消除炉室外的空气扰动和热透镜效应的影响。为进行验证,对铝和45钢样品在室温至748 K范围内的热膨胀系数进行了测量,结果表明在298 K - 598 K范围内TECs的测量重复性优于0.6×10(-6)(K(-1)),并且在598 K - 748 K范围内能够对样品氧化导致的低反射率表面进行高灵敏度非接触测量。

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