Lee ChaBum, Tarbutton Joshua A
Department of Mechanical Engineering, University of South Carolina, 300 Main St., Columbia, South Carolina 29208, USA.
Rev Sci Instrum. 2015 Apr;86(4):045107. doi: 10.1063/1.4918982.
This paper presents a compliance and positioning control characteristics of additive manufactured-nanopositioning system consisted of the flexure mechanism and voice coil motor (VCM). The double compound notch type flexure stage was designed to utilize the elastic deformation of two symmetrical four-bar mechanisms to provide a millimeter-level working range. Additive manufacturing (AM) process, stereolithography, was used to fabricate the flexure stage. The AM stage was inspected by using 3D X-ray computerized tomography scanner: air-voids and shape irregularity. The compliance, open-loop resonance peak, and damping ratio of the AM stage were measured 0.317 mm/N, 80 Hz, and 0.19, respectively. The AM stage was proportional-integral-derivative positioning feedback-controlled and the capacitive type sensor was used to measure the displacement. As a result, the AM flexure mechanism was successfully 25 nm positioning controlled within 500 μm range. The resonance peak was found approximately at 280 Hz in closed-loop. This research showed that the AM flexure mechanism and the VCM can provide millimeter range with high precision and can be a good alternative to an expensive metal-based flexure mechanism and piezoelectric transducer.
本文介绍了一种由挠曲机构和音圈电机（VCM）组成的增材制造纳米定位系统的柔顺性和定位控制特性。双复合缺口型挠曲平台的设计利用了两个对称四杆机构的弹性变形，以提供毫米级的工作范围。采用增材制造（AM）工艺——立体光刻技术来制造挠曲平台。利用三维X射线计算机断层扫描仪对增材制造的平台进行检查，查看是否存在气孔和形状不规则问题。增材制造平台的柔顺性、开环共振峰值和阻尼比分别测得为0.317毫米/牛顿、80赫兹和0.19。对增材制造平台采用比例积分微分定位反馈控制，并使用电容式传感器测量位移。结果，增材制造挠曲机构在500微米范围内成功实现了25纳米的定位控制。在闭环中，共振峰值约出现在280赫兹处。本研究表明，增材制造挠曲机构和音圈电机能够提供高精度的毫米级范围，并且可以成为昂贵的金属基挠曲机构和压电换能器的良好替代方案。
