Fowler Anthony G, Maroufi Mohammad, Moheimani S O Reza
School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia.
Rev Sci Instrum. 2015 Apr;86(4):046107. doi: 10.1063/1.4918729.
A new microelectromechanical systems-based 2-degree-of-freedom (DoF) scanner with an integrated cantilever for on-chip atomic force microscopy (AFM) is presented. The silicon cantilever features a layer of piezoelectric material to facilitate its use for tapping mode AFM and enable simultaneous deflection sensing. Electrostatic actuators and electrothermal sensors are used to accurately position the cantilever within the x-y plane. Experimental testing shows that the cantilever is able to be scanned over a 10 μm × 10 μm window and that the cantilever achieves a peak-to-peak deflection greater than 400 nm when excited at its resonance frequency of approximately 62 kHz.
本文介绍了一种新型的基于微机电系统的两自由度（DoF）扫描仪，该扫描仪集成了用于片上原子力显微镜（AFM）的悬臂。硅悬臂具有一层压电材料，便于其用于轻敲模式原子力显微镜，并实现同时的偏转传感。静电致动器和电热传感器用于在x-y平面内精确地定位悬臂。实验测试表明，悬臂能够在10μm×10μm的窗口上进行扫描，并且当在其约62kHz的共振频率下激发时，悬臂实现了大于400nm的峰-峰偏转。
