Chen Xing, Lee Dong-Weon
MEMS and Nanotechnology Laboratory, School of Mechanical Systems Engineering, Chonnam National University, Gwangju 500 757, Korea.
J Nanosci Nanotechnol. 2010 May;10(5):3236-40. doi: 10.1166/jnn.2010.2257.
We present a new mode of actuation and excitation for cantilevers, which endows cantilevers with large deflection for the specific application. Differing from all of the conventional methods in which the deflection is aroused by the vertical drive of cantilever itself or external vibration, the bending and oscillating actuation here is by means of the in-plane actuators, where the out-of-plane motion of the cantilever is driven by the actuation of integrated in-plane actuators combined with curl-shaped cantilever. Because the driving force of the horizontal actuator can be converted through curl-shaped cantilever into a bending moment that results in cantilever deflection, out-of-plane actuation source for cantilever deflection is independent of the cantilever itself. An in-plane electrostatic actuator with comb-drive structures that has two sets of fixed fingers and one set of moving fingers was introduced for both statically bending and dynamically oscillating the cantilever. The optimal structure was obtained through an analytical model and finite element simulation; it achieves a substantially greater deflection and a concentrated stress distribution located on the hinges, in which the integrated piezoresistive sensors are embedded to suffer from larger stress for high sensitive sensing.
我们提出了一种用于悬臂梁的新型驱动和激励模式，它赋予悬臂梁在特定应用中较大的挠度。与所有传统方法不同，传统方法中挠度是由悬臂梁自身的垂直驱动或外部振动引起的，而这里的弯曲和振荡驱动是通过平面内致动器实现的，其中悬臂梁的平面外运动是由集成平面内致动器与卷曲形悬臂梁的驱动相结合来驱动的。由于水平致动器的驱动力可以通过卷曲形悬臂梁转换为导致悬臂梁挠度的弯矩，因此用于悬臂梁挠度的平面外驱动源与悬臂梁本身无关。引入了一种具有梳齿驱动结构的平面内静电致动器，该致动器有两组固定指和一组移动指，用于使悬臂梁进行静态弯曲和动态振荡。通过解析模型和有限元模拟获得了最佳结构；它实现了显著更大的挠度以及位于铰链上的集中应力分布，其中嵌入了集成压阻式传感器以承受更大的应力用于高灵敏度传感。
