Li Yinan, Kästner Markus, Reithmeier Eduard
Appl Opt. 2015 Feb 20;54(6):1232-40. doi: 10.1364/AO.54.001232.
We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer.
我们提出了一种基于低相干迈克尔逊干涉仪和六轴六足平台的新型测量系统，以使用被测表面的不同倾斜角度准确测量高纵横比结构。为了实现自动测量，该系统设计为自动执行自动聚焦、调整测试表面的倾斜角度、进行表面测量并合并测量数据集。由于某些地形，例如高纵横比结构，干涉仪无法获得足够的反射光来评估测试表面某些区域的高度信息。因此，我们开发了一种测量系统，该系统使用测试表面不同倾斜角度的测量值和拼接算法来实现完整的表面测量数据集。通过实验评估了所提出测量系统的性能，并与使用表面粗糙度仪的测量结果进行了比较。
