Hsieh Hung-Lin, Pan Ssu-Wen
Opt Express. 2015 Feb 9;23(3):2451-65. doi: 10.1364/OE.23.002451.
A grating-based interferometer for 6-DOF displacement and angle measurement is proposed in this study. The proposed interferometer is composed of three identical detection parts sharing the same light source. Each detection part utilizes three techniques: heterodyne, grating shearing, and Michelson interferometries. Displacement information in the three perpendicular directions (X, Y, Z) can be sensed simultaneously by each detection part. Furthermore, angle information (θX, θY, θZ) can be obtained by comparing the displacement measurement results between two corresponding detection parts. The feasibility and performance of the proposed grating-based interferometer are evaluated in displacement and angle measurement experiments. In comparison with the internal capacitance sensor built into the commercial piezo-stage, the measurement resolutions of the displacement and angle of our proposed interferometer are about 2 nm and 0.05 μrad.
本研究提出了一种用于六自由度位移和角度测量的基于光栅的干涉仪。所提出的干涉仪由共享同一光源的三个相同检测部分组成。每个检测部分采用三种技术：外差、光栅剪切和迈克尔逊干涉测量法。每个检测部分可同时感测三个垂直方向（X、Y、Z）上的位移信息。此外，通过比较两个相应检测部分之间的位移测量结果可获得角度信息（θX、θY、θZ）。在位移和角度测量实验中评估了所提出的基于光栅的干涉仪的可行性和性能。与商业压电平台内置的内部电容传感器相比，我们所提出的干涉仪的位移和角度测量分辨率分别约为2纳米和0.05微弧度。
