Mehrotra K, Oliver J B, Lambropoulos J C
Appl Opt. 2015 Mar 20;54(9):2435-40. doi: 10.1364/AO.54.002435.
Mechanical characterization of optical oxide thin films is performed using nano-indentation, and the results are explained based on the deposition conditions used. These oxide films are generally deposited to have a porous microstructure that optimizes laser induced damage thresholds, but changes in deposition conditions lead to varying degrees of porosity, density, and possibly the microstructure of the thin film. This can directly explain the differences in the mechanical properties of the film studied here and those reported in literature. Of the four single-layer thin films tested, alumina was observed to demonstrate the highest values of nano-indentation hardness and elastic modulus. This is likely a result of the dense microstructure of the thin film arising from the particular deposition conditions used.
利用纳米压痕技术对光学氧化物薄膜进行力学表征，并根据所使用的沉积条件对结果进行解释。这些氧化物薄膜通常沉积成具有优化激光诱导损伤阈值的多孔微观结构，但沉积条件的变化会导致薄膜的孔隙率、密度以及可能的微观结构出现不同程度的变化。这可以直接解释本文所研究薄膜与文献报道薄膜在力学性能上的差异。在所测试的四种单层薄膜中，观察到氧化铝表现出最高的纳米压痕硬度和弹性模量值。这可能是由于所采用的特定沉积条件导致薄膜具有致密的微观结构。
