通过镱混合光纤激光器与铒光纤激光器之间的频率混合在193纳米处产生300毫瓦窄线宽深紫外光。

300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers.

作者信息

Xuan Hongwen, Zhao Zhigang, Igarashi Hironori, Ito Shinji, Kakizaki Kouji, Kobayashi Yohei

出版信息

Opt Express. 2015 Apr 20;23(8):10564-72. doi: 10.1364/OE.23.010564.

DOI:10.1364/OE.23.010564

Abstract

A narrow-linewidth, high average power deep-ultraviolet (DUV) coherent laser emitting at 193 nm is demonstrated by frequency mixing a Yb-hybrid laser with an Er-fiber laser. The Yb-hybrid laser consists of Yb-fiber lasers and an Yb:YAG amplifier. The average output power of the 193 nm laser is 310 mW at 6 kHz, which corresponds to a pulse energy of 51 μJ. To the best of our knowledge, this is the highest average power and pulse energy ever reported for a narrow-linewidth 193 nm light generated by a combination of solid-state and fiber lasers with frequency mixing. We believe this laser will be beneficial for the application of interference lithography by seeding an injection-locking ArF eximer laser.

摘要

通过将掺镱混合激光器与掺铒光纤激光器进行频率混合，演示了一种发射波长为193nm的窄线宽、高平均功率深紫外（DUV）相干激光器。掺镱混合激光器由掺镱光纤激光器和一个掺镱钇铝石榴石放大器组成。193nm激光器在6kHz时的平均输出功率为310mW，对应脉冲能量为51μJ。据我们所知，这是通过固态激光器和光纤激光器组合并进行频率混合产生的窄线宽193nm光所报道的最高平均功率和脉冲能量。我们相信，通过注入锁定ArF准分子激光器的种子光，这种激光器将有利于干涉光刻的应用。