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具有增益开关激光二极管种子注入的主振荡功率放大器和大尺寸硼酸铯锂晶体的高功率深紫外皮秒脉冲激光器

High-power DUV picosecond pulse laser with a gain-switched-LD-seeded MOPA and large CLBO crystal.

作者信息

Kohno Kenta, Orii Yosuke, Sawada Hisashi, Okuyama Daisuke, Shibuya Kimihiko, Shimizu Seiji, Yoshimura Masashi, Mori Yusuke, Nishimae Junichi, Okada George

出版信息

Opt Lett. 2020 Apr 15;45(8):2351-2354. doi: 10.1364/OL.389017.

Abstract

We report the generation of a 266 nm deep ultraviolet (DUV) picosecond pulse with an average output power of 14 W by the fourth-harmonic generation (FHG) from two consecutive frequency-doubling stages of a 1064 nm pulse based on a gain-switched-laser-diode (LD)-seeded hybrid fiber/solid-state master oscillator and power amplifier (MOPA) system. Through the gain-switched operation of a narrow-spectral-linewidth distributed-feedback laser diode and by using a Yb-doped fiber and a two-stage ${\rm Nd}:{{\rm YVO}_4}$Nd:YVO solid-state amplifier, we achieved an average power of 46.5 W near the Fourier transform limit for a 13 ps pulse with a repetition rate of 200 kHz. The narrow linewidth pulse characteristics enabled highly efficient frequency conversion, and the efficiency of conversion from 532 to 266 nm was 54%, and from 1064 to 266 nm was 31%. The beam quality factor ${M^2}$M of the generated DUV pulse was below 1.2. The highly efficient FHG process resulted in appeasing thermal stress caused by nonlinear absorption in the crystal, and more than 5000 h of continuous operation were achieved without any power down or beam profile degradation.

摘要

我们报道了基于增益开关激光二极管(LD)种子源的混合光纤/固态主振荡器和功率放大器(MOPA)系统,通过对1064 nm脉冲进行连续两级倍频的四阶谐波产生(FHG),产生了平均输出功率为14 W的266 nm深紫外(DUV)皮秒脉冲。通过窄谱线宽度分布反馈激光二极管的增益开关操作,并使用掺镱光纤和两级Nd:YVO₄固态放大器,我们在重复频率为200 kHz时,实现了13 ps脉冲在傅里叶变换极限附近46.5 W的平均功率。窄线宽脉冲特性实现了高效频率转换,从532 nm到266 nm的转换效率为54%,从1064 nm到266 nm的转换效率为31%。所产生的深紫外脉冲的光束质量因子M²低于1.2。高效的四阶谐波产生过程减轻了晶体中非线性吸收引起的热应力,实现了超过5000小时的连续运行,且没有任何功率下降或光束轮廓劣化。

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