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在CsLiBO(CLBO)晶体中产生的波长为258nm、光束质量M<1.5的高功率、高转换效率深紫外(DUV)激光器。

High-power and high-conversion efficiency deep ultraviolet (DUV) laser at 258  nm generation in the CsLiBO (CLBO) crystal with a beam quality of M<1.5.

作者信息

Xuan Hongwen, Qu Chen, Ito Shinji, Kobayashi Yohei

出版信息

Opt Lett. 2017 Aug 15;42(16):3133-3136. doi: 10.1364/OL.42.003133.

Abstract

We report a 10 kHz, 10.5 W deep ultraviolet (DUV) laser at 258 nm with a pulse duration of 3 ns by fourth-harmonic generation (FHG) in a CsLiBO crystal with high-conversion efficiency. The fundamental laser is at 1030 nm with 35 W output power consisting of a Yb:YAG ceramics thin rod amplifier. The M of the DUV laser was confirmed to be <1.5. To the best of our knowledge, this is the best beam quality for DUV laser power higher than 10 W generated by FHG of a solid-state laser, as well as the highest conversion efficiency of 31% from infrared to DUV so far.

摘要

我们报道了一种通过在CsLiBO晶体中进行四波混频(FHG)产生的258nm、10kHz、10.5W的深紫外(DUV)激光,脉冲持续时间为3ns,转换效率高。基频激光为1030nm,输出功率为35W,由Yb:YAG陶瓷细棒放大器组成。该深紫外激光的M值经确认小于1.5。据我们所知,这是固态激光通过四波混频产生的高于10W的深紫外激光的最佳光束质量,也是迄今为止从红外到深紫外的最高转换效率,达31%。

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