Pacheco Shaun, Brand Jonathan F, Zaverton Melissa, Milster Tom, Liang Rongguang
Opt Express. 2015 May 4;23(9):11771-82. doi: 10.1364/OE.23.011771.
A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating.
描述了一种设计对制造误差低敏感度的一维分束相位光栅的方法。该方法通过在一系列制造误差范围内最小化每个输出光束能量的积分方差来优化光栅的相位函数。给出了三个1×9分束相位光栅的数值结果。将两个对制造误差低敏感度的优化光栅与一个为实现最佳效率而设计的光栅进行了比较。这三个光栅采用灰度光刻法制造。优化光栅中9个出射光束能量的标准差分别比最佳效率光栅低2.3倍和3.4倍。
