Dames M P, Dowling R J, McKee P, Wood D
Appl Opt. 1991 Jul 1;30(19):2685-91. doi: 10.1364/AO.30.002685.
We report on the design and fabrication of fully 2-D surface relief diffraction elements that can split a single collimated beam into many beams in an arbitrary intensity distribution. These splitters were designed by computer using simulated annealing, and made into phase gratings by electron-beam lithography followed by plasma etching into quartz glass. Both two and four phase level gratings have been fabricated, allowing a wide range of uniform and weighted spot patterns to be generated. These grating elements have a measured diffraction efficiency of over 74%, with the beam intensity ratios accurate to within 1% of their target values.
我们报告了全二维表面浮雕衍射元件的设计与制造，该元件能够将单束准直光束分裂为许多具有任意强度分布的光束。这些分束器通过计算机利用模拟退火进行设计，并通过电子束光刻制作成相位光栅，随后在石英玻璃上进行等离子蚀刻。已制作出二相和四相水平光栅，可产生广泛的均匀和加权光斑图案。这些光栅元件的测量衍射效率超过74%，光束强度比精确到目标值的1%以内。
