Xu Lei, Dai Zhengfei, Duan Guotao, Guo Lianfeng, Wang Yi, Zhou Hong, Liu Yanxiang, Cai Weiping, Wang Yuelin, Li Tie
1] Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China [2] California Institute of Technology, Pasadena, California 91125, USA.
Key Lab of Materials Physics, Anhui Key lab of Nanomaterials and Nanotechnology, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei, 230031, Anhui, China.
Sci Rep. 2015 May 22;5:10507. doi: 10.1038/srep10507.
Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of in-situ wafer-level fabrication of the high-performance micro/nano gas sensing chips by naturally integrating microhotplatform (MHP) with nanopore array (NPA). By introducing colloidal crystal template, a wafer-level ordered homogenous SnO2 NPA is synthesized in-situ on a 4-inch MHP wafer, able to produce thousands of gas sensing units in one batch. The integration of micromachining process and nanofabrication process endues micro/nano gas sensing chips at low cost, high throughput, and with high sensitivity (down to ~20 ppb), fast response time (down to ~1 s), and low power consumption (down to ~30 mW). The proposed strategy of integrating MHP with NPA represents a versatile approach for in-situ wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.
纳米结构的气体传感材料，特别是纳米颗粒、纳米管和纳米线，能够使气体传感器在十亿分之一（ppb）水平上具有高灵敏度。对于实际应用而言，非常希望能够以低成本批量制造这种气体传感器。我们在此提出一种通过将微热平台（MHP）与纳米孔阵列（NPA）自然集成来原位晶圆级制造高性能微纳气体传感芯片的策略。通过引入胶体晶体模板，在4英寸的MHP晶圆上原位合成了晶圆级有序均匀的SnO₂纳米孔阵列，能够在一批中生产数千个气体传感单元。微加工工艺和纳米制造工艺的结合使得微纳气体传感芯片具有低成本、高通量的特点，并且具有高灵敏度（低至约20 ppb）、快速响应时间（低至约1 s）和低功耗（低至约30 mW）。所提出的将MHP与NPA集成的策略代表了一种用于原位晶圆级制造适用于实际工业应用的高性能微纳气体传感器的通用方法。
