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微热板气体传感器敏感材料涂层的研究进展

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor.

作者信息

Yuan Zhenyu, Yang Fan, Meng Fanli

机构信息

College of Information Science and Engineering, Northeastern University, Shenyang 110819, China.

State Key Laboratory of Synthetical Automation for Process Industries, Northeastern University, Shenyang 110819, China.

出版信息

Micromachines (Basel). 2022 Mar 21;13(3):491. doi: 10.3390/mi13030491.

DOI:10.3390/mi13030491
PMID:35334783
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8952244/
Abstract

Micro-hotplate gas sensors are widely used in air quality monitoring, identification of hazardous chemicals, human health monitoring, and other fields due to their advantages of small size, low power consumption, excellent consistency, and fast response speed. The micro-hotplate gas sensor comprises a micro-hotplate and a gas-sensitive material layer. The micro-hotplate is responsible for providing temperature conditions for the sensor to work. The gas-sensitive material layer is responsible for the redox reaction with the gas molecules to be measured, causing the resistance value to change. The gas-sensitive material film with high stability, fantastic adhesion, and amazing uniformity is prepared on the surface of the micro-hotplate to realize the reliable assembly of the gas-sensitive material and the micro-hotplate, which can improve the response speed, response value, and selectivity. This paper first introduces the classification and structural characteristics of micro-hotplates. Then the assembly process and characteristics of various gas-sensing materials and micro-hotplates are summarized. Finally, the assembly method of the gas-sensing material and the micro-hotplate prospects.

摘要

微热板气体传感器因其体积小、功耗低、一致性好、响应速度快等优点，在空气质量监测、有害化学物质识别、人体健康监测等领域得到广泛应用。微热板气体传感器由微热板和气敏材料层组成。微热板负责为传感器工作提供温度条件。气敏材料层负责与被测气体分子发生氧化还原反应，导致电阻值变化。在微热板表面制备具有高稳定性、良好附着力和惊人均匀性的气敏材料薄膜，实现气敏材料与微热板的可靠组装，可提高响应速度、响应值和选择性。本文首先介绍了微热板的分类和结构特点。然后总结了各种气敏材料与微热板的组装工艺及特点。最后对气敏材料与微热板的组装方法进行了展望。

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