Tsai Cheng-Hua, Tsai Chun-Wei, Chang Hsu-Tang, Liu Shih-Hsiang, Tsai Jui-Che
Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan.
Sensors (Basel). 2015 Jun 22;15(6):14745-56. doi: 10.3390/s150614745.
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.
提出了三种不同的具有Cr/Au-Si双压电晶片致动器的电热驱动MEMS微镜。这些器件采用MEMSCAP公司（美国北卡罗来纳州达勒姆）开发的SOIMUMPs工艺制造。已采用绝缘体上硅MEMS工艺来制造这些微镜。电热驱动已在微镜中实现了大角度运动。向弯曲型、受限扭转型和自由扭转型微镜施加0.04 A的外部电流时，分别实现了1.69°、3.28°和3.64°的旋转角度。
