Cheng Xiang, Sun Xinglin, Liu Yan, Zhu Lijun, Zhang Xiaoyang, Zhou Liang, Xie Huikai
School of Aerospace Engineering, Xiamen University, Xiamen 361005, China.
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA.
Sensors (Basel). 2018 Mar 26;18(4):982. doi: 10.3390/s18040982.
Scanning micromirrors have been used in a wide range of areas, but many of them do not have position sensing built in, which significantly limits their application space. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting angle of electrothermal MEMS (Micro-electromechanical Systems) scanning mirrors. The iOE-PS integrates a laser diode and its driving circuits, a quadrant photo-detector (QPD) and its readout circuits, and a band-gap reference all on a single chip, and it has been fabricated in a standard 0.5 μm CMOS (Complementary Metal Oxide Semiconductor) process. The footprint of the iOE-PS chip is 5 mm × 5 mm. Each quadrant of the QPD has a photosensitive area of 500 µm × 500 µm and the spacing between adjacent quadrants is 500 μm. The iOE-PS chip is simply packaged underneath of an electrothermally-actuated MEMS mirror. Experimental results show that the iOE-PS has a linear response when the MEMS mirror plate moves vertically between 2.0 mm and 3.0 mm over the iOE-PS chip or scans from -5 to +5°. Such MEMS scanning mirrors integrated with the iOE-PS can greatly reduce the complexity and cost of the MEMS mirrors-enabled modules and systems.
扫描微镜已被广泛应用于诸多领域，但其中许多扫描微镜并未内置位置传感功能，这极大地限制了它们的应用空间。本文报道了一种集成光电位置传感器（iOE - PS），它能够测量电热微机电系统（MEMS）扫描镜的线性位移和倾斜角度。该iOE - PS在单个芯片上集成了一个激光二极管及其驱动电路、一个象限光电探测器（QPD）及其读出电路，以及一个带隙基准，并且它是采用标准的0.5μm互补金属氧化物半导体（CMOS）工艺制造的。iOE - PS芯片的占地面积为5mm×5mm。QPD的每个象限的光敏面积为500μm×500μm，相邻象限之间的间距为500μm。iOE - PS芯片简单地封装在一个电热驱动的MEMS镜下方。实验结果表明，当MEMS镜板在iOE - PS芯片上方垂直移动2.0mm至3.0mm或从 - 5°扫描到 + 5°时，iOE - PS具有线性响应。这种与iOE - PS集成的MEMS扫描镜可以大大降低启用MEMS镜的模块和系统的复杂性和成本。
