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实时显微相移轮廓术

Real-time microscopic phase-shifting profilometry.

作者信息

Van der Jeught Sam, Soons Joris A M, Dirckx Joris J J

出版信息

Appl Opt. 2015 May 20;54(15):4953-9. doi: 10.1364/AO.54.004953.

DOI:10.1364/AO.54.004953
PMID:26192534
Abstract

A real-time microscopic profilometry system based on digital fringe projection and parallel programming has been developed and experimentally tested. Structured light patterns are projected onto an object through one pathway of a stereoscopic operation microscope. The patterns are deformed by the shape of the object and are then recorded with a high-speed CCD camera placed in the other pathway of the microscope. As the optical pathways of both arms are separated and reach the same object point at a relative angle, the recorded patterns allow the full-field object height variations to be calculated and the three-dimensional shape to be reconstructed by employing standard triangulation techniques. Applying proper hardware triggering, the projector-camera system is synchronized to capture up to 120 unique deformed line patterns per second. Using standard four-step phase-shifting profilometry techniques and applying graphics processing unit programming for fast phase wrapping, scaling, and visualization, we demonstrate the capability of the proposed system to generate 30 microscopic height maps per second. This allows the qualitative depth perception of the stereomicroscope operator to be enhanced by live quantitative height measurements with depth resolutions in the micrometer range.

摘要

一种基于数字条纹投影和平行编程的实时微观轮廓测量系统已被开发并进行了实验测试。结构化光图案通过立体手术显微镜的一个光路投射到物体上。图案因物体形状而变形,然后由置于显微镜另一光路的高速CCD相机记录。由于双臂的光路是分开的,并以相对角度到达同一物点,所记录的图案允许通过采用标准三角测量技术计算全场物体高度变化并重建三维形状。通过适当的硬件触发,投影仪-相机系统同步,每秒可捕获多达120个独特的变形线条图案。使用标准的四步相移轮廓测量技术,并应用图形处理单元编程进行快速相位展开、缩放和可视化,我们展示了所提出系统每秒生成30个微观高度图的能力。这使得立体显微镜操作员通过具有微米级深度分辨率的实时定量高度测量来增强定性深度感知。

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引用本文的文献

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J Imaging. 2024 Jul 24;10(8):179. doi: 10.3390/jimaging10080179.
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Microscopic scan-free surface profiling over extended axial ranges by point-spread-function engineering.通过点扩散函数工程实现扩展轴向范围内的微观无扫描表面轮廓分析。
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