Lee Sang Heon
Department of Mechanical Design Engineering, Andong National University, Andong, Kyungbuk 760-749, South Korea.
Rev Sci Instrum. 2015 Aug;86(8):086103. doi: 10.1063/1.4928528.
We developed a compact and light displacement sensor applicable to systems that require wide range motions of its sensing device. The proposed sensor utilized the optical pickup unit of the optical disk drive, which has been used applied to atomic force microscopy (AFM) because of its compactness and lightness as well as its high performance. We modified the structure of optical pickup unit and made the compact sensor driver attachable to a probe head of AFM to make large rotation. The feasibilities of the developed sensor for a general probe-moving measurement device and for probe-rotating AFM were verified. Moreover, a simple and precise measurement of alignment between centers of rotator and probe tip in probe-rotation AFM was experimentally demonstrated using the developed sensor.
我们开发了一种紧凑轻便的位移传感器，适用于其传感装置需要大范围运动的系统。所提出的传感器利用了光盘驱动器的光学拾取单元，由于其紧凑性、轻便性以及高性能，该单元已被应用于原子力显微镜（AFM）。我们修改了光学拾取单元的结构，并使紧凑型传感器驱动器可连接到AFM的探头，以实现大角度旋转。验证了所开发的传感器用于一般探针移动测量装置和探针旋转AFM的可行性。此外，使用所开发的传感器通过实验证明了在探针旋转AFM中对旋转器中心与探针尖端之间对准的简单而精确的测量。
