无掩模飞秒激光脉冲在开放空气中对高导电性金属纳米线的空间调制图案化。
Mask-Free Patterning of High-Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses.
机构信息
Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, China.
Laboratory of Organic Nanophotonics and Key Laboratory of Photochemical Convention and Functional Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, 100190, China.
出版信息
Adv Mater. 2015 Oct 28;27(40):6238-43. doi: 10.1002/adma.201503289. Epub 2015 Sep 16.
A novel high-resolution nanowire fabrication method is developed by thin-film patterning using a spatially modulated femtosecond laser pulse. Deep subwavelength (≈1/13 of the laser wavelength) and high conductivity (≈1/4 of the bulk gold) nanowires are fabricated in the open air without using masks, which offers a single-step arbitrary direct patterning approach for electronics, plasmonics, and optoelectronics nanodevices.
提出了一种通过空间调制飞秒激光脉冲的薄膜图形化方法来制备新型高分辨率纳米线的方法。在不使用掩模的情况下，在空气中制备了深亚波长（≈激光波长的 1/13）和高导电性（≈体金的 1/4）纳米线，为电子、等离子体和光电纳米器件提供了一种单步任意直接图案化方法。
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