Wang Zhipeng, Jiang Lan, Li Xiaowei, Gao Shuai, Zhou Shipeng, Liu Yang, Huang Lingling, Lu Jiangang, Yin Jiangang
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China.
Beijing Institute of Technology Chongqing Innovation Center, Chongqing, 401120, China.
Nanophotonics. 2022 May 24;11(13):3081-3091. doi: 10.1515/nanoph-2022-0112. eCollection 2022 Jun.
To meet the growing demand for photonic integration and device miniaturization, planar diffractive Fresnel zone plates (FZPs) are widely applied in integrated optical systems. However, challenges remain in fabricating FZPs with high efficiency and satisfying the requirement for cross-scale fabrication. This paper details a high efficiency method for fabricating ultrathin FZPs of different scales on metal films by using holographic femtosecond lasers. The FZPs are split into a series of element patterns that are printed in order by using corresponding modulated femtosecond pulses. The fabricated FZPs are spliced by the printed element structures with no FZP size limitation in theory. FZPs with an area varying across three orders of magnitude are presented to demonstrate the capability of cross-scale fabrication. The fabricated FZPs possess an excellent broadband focusing and imaging ability in the visible spectrum. Furthermore, the fabrication of other functional ultrathin lenses, such as axial multifocal zone plates, petal-like zone plates, and FZP arrays, is described, revealing the wide potential for the flexible and scalable fabrication method in on-chip integrated optical systems.
为满足对光子集成和器件小型化日益增长的需求，平面衍射菲涅耳波带片（FZPs）在集成光学系统中得到广泛应用。然而，在制造高效的FZPs以及满足跨尺度制造要求方面仍存在挑战。本文详细介绍了一种利用全息飞秒激光在金属膜上制造不同尺度超薄FZPs的高效方法。FZPs被分割成一系列元素图案，通过使用相应调制的飞秒脉冲按顺序打印。理论上，通过打印的元素结构拼接制造的FZPs没有FZP尺寸限制。展示了面积跨越三个数量级的FZPs，以证明跨尺度制造的能力。制造的FZPs在可见光谱中具有出色的宽带聚焦和成像能力。此外，还描述了其他功能性超薄透镜的制造，如轴向多焦点波带片、花瓣状波带片和FZP阵列，揭示了这种灵活且可扩展的制造方法在片上集成光学系统中的广阔潜力。
