Schroeder J L, Thomson W, Howard B, Schell N, Näslund L-Å, Rogström L, Johansson-Jõesaar M P, Ghafoor N, Odén M, Nothnagel E, Shepard A, Greer J, Birch J
Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
PVD Products Inc., 35 Upton Dr., Suite 200, Wilmington, Massachusetts 01887, USA.
Rev Sci Instrum. 2015 Sep;86(9):095113. doi: 10.1063/1.4930243.
We present an industry-relevant, large-scale, ultra-high vacuum (UHV) magnetron sputtering and cathodic arc deposition system purposefully designed for time-resolved in situ thin film deposition/annealing studies using high-energy (>50 keV), high photon flux (>10(12) ph/s) synchrotron radiation. The high photon flux, combined with a fast-acquisition-time (<1 s) two-dimensional (2D) detector, permits time-resolved in situ structural analysis of thin film formation processes. The high-energy synchrotron-radiation based x-rays result in small scattering angles (<11°), allowing large areas of reciprocal space to be imaged with a 2D detector. The system has been designed for use on the 1-tonne, ultra-high load, high-resolution hexapod at the P07 High Energy Materials Science beamline at PETRA III at the Deutsches Elektronen-Synchrotron in Hamburg, Germany. The deposition system includes standard features of a typical UHV deposition system plus a range of special features suited for synchrotron radiation studies and industry-relevant processes. We openly encourage the materials research community to contact us for collaborative opportunities using this unique and versatile scientific instrument.
我们展示了一种与工业相关的大规模超高真空（UHV）磁控溅射和阴极电弧沉积系统，该系统专为使用高能（>50 keV）、高光子通量（>10¹² ph/s）同步辐射进行时间分辨原位薄膜沉积/退火研究而设计。高光子通量与快速采集时间（<1 s）的二维（2D）探测器相结合，能够对薄膜形成过程进行时间分辨原位结构分析。基于高能同步辐射的X射线产生小散射角（<11°），使得二维探测器能够对倒易空间的大面积区域进行成像。该系统设计用于德国汉堡的德国电子同步加速器PETRA III的P07高能材料科学光束线上的1吨超高负载、高分辨率六轴平台。该沉积系统具备典型超高真空沉积系统的标准特性，还拥有一系列适用于同步辐射研究和与工业相关工艺的特殊特性。我们诚挚地鼓励材料研究界与我们联系，以利用这一独特且多功能的科学仪器开展合作。
