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基于两步解调算法的同步相移双波长干涉测量法

Simultaneous phase-shifting dual-wavelength interferometry based on two-step demodulation algorithm.

作者信息

Zhang Wangping, Lu Xiaoxu, Fei Leihuan, Zhao Hui, Wang Hanling, Zhong Liyun

出版信息

Opt Lett. 2014 Sep 15;39(18):5375-8. doi: 10.1364/OL.39.005375.

DOI:10.1364/OL.39.005375
PMID:26466276
Abstract

A simultaneous phase-shifting dual-wavelength interferometry based on two-step demodulation algorithm is proposed in this Letter. First, two lasers with different wavelengths go through the same inline phase-shifting interference system simultaneously, and a sequence of five frames of simultaneous phase-shifting dual-wavelength interferograms (SPSDWIs) with the special phase shifts are captured by a monochrome CCD. Subsequently, using the subtraction between the first SPSDWI and the other SPSDWI, each wavelength of two frames of single-wavelength interference images (SWIIs) without the background can be achieved. Finally, using two-step demodulation algorithm, the wrapped phase of each single-wavelength can be determined easily and quickly with high accuracy.

摘要

本文提出了一种基于两步解调算法的同步相移双波长干涉测量方法。首先,两个不同波长的激光器同时通过同一个同轴相移干涉系统,由单色电荷耦合器件(CCD)采集具有特定相移的五帧同步相移双波长干涉图(SPSDWIs)序列。随后,通过第一幅SPSDWI与其他SPSDWI相减,可得到两帧无背景的单波长干涉图像(SWIIs)中每个波长的图像。最后,利用两步解调算法,能够轻松、快速且高精度地确定每个单波长的包裹相位。

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