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用于具有盲相移的同步双波长相移干涉测量的欧几里得矩阵范数算法

Euclidean matrix norm algorithm for simultaneous dual-wavelength phase-shifting interferometry with blind phase shifts.

作者信息

Xu Yuanyuan, Shen Qibao, Liang Yu, Xue Shuangshuang, Wang Yawei, Zhu Shining

出版信息

Appl Opt. 2019 Dec 10;58(35):9556-9561. doi: 10.1364/AO.58.009556.

DOI:10.1364/AO.58.009556
PMID:31873554
Abstract

In this study, a simultaneous dual-wavelength phase-shifting interferometry system using two reference arms was built, and a simple phase retrieval method for the system with blind phase shifts was proposed using five phase-shifted interferograms. First, the unknown phase shifts were controlled independently to separate the information of single wavelength, which can be calculated directly by using the Euclidean matrix norm algorithm. Second, a wrapped phase of a single wavelength was obtained using a three-step phase-shifting algorithm. Finally, a continuous phase of a synthetic wavelength was obtained. The simulation and experimental results indicated the feasibility and greater accuracy of the proposed method. Moreover, the strict requirement of the phase shifter was eliminated because of the use of arbitrary and unknown phase shifts, thereby making experimental operation easier.

摘要

在本研究中,构建了一种使用两个参考臂的同步双波长相移干涉测量系统,并提出了一种利用五幅相移干涉图对具有盲相移的该系统进行简单相位恢复的方法。首先,独立控制未知相移以分离单波长信息,可通过使用欧几里得矩阵范数算法直接计算该信息。其次,使用三步相移算法获得单波长的包裹相位。最后,获得合成波长的连续相位。仿真和实验结果表明了该方法的可行性和更高的精度。此外,由于使用了任意和未知的相移,消除了对相移器的严格要求,从而使实验操作更容易。

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