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飞秒光学涡旋光束诱导的硅激光烧蚀

Laser ablation of silicon induced by a femtosecond optical vortex beam.

作者信息

Nivas Jijil J J, Shutong He, Anoop K K, Rubano A, Fittipaldi R, Vecchione A, Paparo D, Marrucci L, Bruzzese R, Amoruso S

出版信息

Opt Lett. 2015 Oct 15;40(20):4611-4. doi: 10.1364/OL.40.004611.

DOI:10.1364/OL.40.004611
PMID:26469576
Abstract

We investigate laser ablation of crystalline silicon induced by a femtosecond optical vortex beam, addressing how beam properties can be obtained by analyzing the ablation crater. The morphology of the surface structures formed in the annular crater surface allows direct visualization of the beam polarization, while analysis of the crater size provides beam spot parameters. We also determine the diverse threshold fluences for the formation of various complex microstructures generated within the annular laser spot on the silicon sample. Our analysis indicates an incubation behavior of the threshold fluence as a function of the number of laser pulses, independent of the optical vortex polarization, in weak focusing conditions.

摘要

我们研究了飞秒光学涡旋光束诱导的晶体硅激光烧蚀,探讨了如何通过分析烧蚀坑来获得光束特性。环形坑表面形成的表面结构形态可直接观察光束偏振,而对坑尺寸的分析则可提供束斑参数。我们还确定了硅样品上环形激光光斑内产生各种复杂微结构的不同阈值能量密度。我们的分析表明,在弱聚焦条件下,阈值能量密度存在与光学涡旋偏振无关的、随激光脉冲数变化的孕育行为。

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Laser ablation of silicon induced by a femtosecond optical vortex beam.飞秒光学涡旋光束诱导的硅激光烧蚀
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Generation of Supra-Wavelength Grooves in Femtosecond Laser Surface Structuring of Silicon.飞秒激光对硅进行表面结构化处理时超波长沟槽的产生
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Adaptive optics in laser processing.激光加工中的自适应光学
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Surface structures with unconventional patterns and shapes generated by femtosecond structured light fields.由飞秒结构化光场产生的具有非常规图案和形状的表面结构。
Sci Rep. 2018 Sep 11;8(1):13613. doi: 10.1038/s41598-018-31768-w.
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Surface Structuring with Polarization-Singular Femtosecond Laser Beams Generated by a q-plate.利用 q 板产生的偏振奇异飞秒激光束进行表面结构化。
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Topological features of vector vortex beams perturbed with uniformly polarized light.拓扑特征的向量涡旋光束与均匀偏振光。
Sci Rep. 2017 Jan 12;7:40195. doi: 10.1038/srep40195.
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Picosecond optical vortex pulse illumination forms a monocrystalline silicon needle.皮秒光学涡旋脉冲照明形成单晶硅针。
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