Dinda S, Suresh V, Thoniyot P, Balčytis A, Juodkazis S, Krishnamoorthy S
Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), 3, Research Link, Singapore 117602, Singapore.
Department of Biotechnology, School of Pharmaceutical Sciences, Siksha O Anushandan University (SOA) , Bhubaneswar, 751030, India.
ACS Appl Mater Interfaces. 2015 Dec 23;7(50):27661-6. doi: 10.1021/acsami.5b07745. Epub 2015 Dec 14.
We demonstrate the fabrication of plasmonic sensors that comprise gold nanopillar arrays exhibiting high surface areas, and narrow gaps, through self-assembly of amphiphilic diblock copolymer micelles on silicon substrates. Silicon nanopillars with high integrity over arbitrary large areas are obtained using copolymer micelles as lithographic templates. The gaps between metal features are controlled by varying the thickness of the evaporated gold. The resulting gold metal nanopillar arrays exhibit an engineered surface topography, together with uniform and controlled separations down to sub-10 nm suitable for highly sensitive detection of molecular analytes by Surface Enhanced Raman Spectroscopy (SERS). The significance of the approach is demonstrated through the control exercised at each step, including template preparation and pattern-transfer steps. The approach is a promising means to address trade-offs between resolutions, throughput, and performance in the fabrication of nanoplasmonic assemblies for sensing applications.
我们展示了等离子体传感器的制造方法，该传感器通过两亲性二嵌段共聚物胶束在硅基板上的自组装，形成具有高表面积和窄间隙的金纳米柱阵列。使用共聚物胶束作为光刻模板，可在任意大面积上获得具有高完整性的硅纳米柱。通过改变蒸发金的厚度来控制金属特征之间的间隙。所得的金金属纳米柱阵列呈现出经过设计的表面形貌，以及均匀且可控的间距，小至亚10纳米，适用于通过表面增强拉曼光谱（SERS）对分子分析物进行高灵敏度检测。通过在每个步骤（包括模板制备和图案转移步骤）中实施的控制，证明了该方法的重要性。该方法是一种很有前景的手段，可解决用于传感应用的纳米等离子体组件制造中分辨率、产量和性能之间的权衡问题。
