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使用激光反馈光栅干涉仪进行位移测量。

Displacement measurement using a laser feedback grating interferometer.

作者信息

Guo Dongmei, Wang Ming, Hao Hui

出版信息

Appl Opt. 2015 Nov 1;54(31):9320-5. doi: 10.1364/AO.54.009320.

DOI:10.1364/AO.54.009320
PMID:26560588
Abstract

A novel laser feedback grating interferometer (LFGI) with a phase-generated carrier demodulation technique is proposed in this paper. Laser feedback grating interference occurs when light emitted from a laser is diffracted by the double-diffraction system and re-enters the laser active cavity, thus generating a modulation of the lasing field. In order to improve the displacement measurement resolution, phase modulation is introduced by an electro-optic modulator in the external cavity of the LFGI. Detection of the displacement can be easily achieved by the time-domain orthogonal demodulation, which does not involve any complicated calculation and is insensitive to the sampling error. Experimental results show that the proposed system has a general nanometer-level resolution. It provides a potential displacement sensor with high resolution, simple mechanical structure, and good reliability.

摘要

本文提出了一种采用相位载波解调技术的新型激光反馈光栅干涉仪(LFGI)。当激光器发出的光被双衍射系统衍射并重新进入激光有源腔时,会发生激光反馈光栅干涉,从而产生激光场的调制。为了提高位移测量分辨率,在LFGI的外腔中通过电光调制器引入相位调制。通过时域正交解调可以轻松实现位移检测,该方法不涉及任何复杂计算,并且对采样误差不敏感。实验结果表明,所提出的系统具有一般的纳米级分辨率。它提供了一种具有高分辨率、简单机械结构和良好可靠性的潜在位移传感器。

相似文献

1
Displacement measurement using a laser feedback grating interferometer.使用激光反馈光栅干涉仪进行位移测量。
Appl Opt. 2015 Nov 1;54(31):9320-5. doi: 10.1364/AO.54.009320.
2
Note: Design of a laser feedback interferometer with double diffraction system.注意:具有双衍射系统的激光反馈干涉仪的设计。
Rev Sci Instrum. 2015 Sep;86(9):096111. doi: 10.1063/1.4931781.
3
Note: Simultaneous measurement of in-plane and out-of-plane displacement by using orthogonally polarized self-mixing grating interferometer.注意:使用正交偏振自混合光栅干涉仪同时测量面内和面外位移。
Rev Sci Instrum. 2018 Sep;89(9):096113. doi: 10.1063/1.5026471.
4
Linear diffraction grating interferometer with high alignment tolerance and high accuracy.具有高对准容差和高精度的线性衍射光栅干涉仪。
Appl Opt. 2011 Aug 1;50(22):4550-6. doi: 10.1364/AO.50.004550.
5
High-accuracy sinusoidal phase-modulating self-mixing interferometer using an electro-optic modulator: development and evaluation.使用电光调制器的高精度正弦相位调制自混合干涉仪:研制与评估
Appl Opt. 2013 Feb 1;52(4):B52-9. doi: 10.1364/AO.52.000B52.
6
Nanometer-scale displacement sensor based on phase-sensitive diffraction grating.
Appl Opt. 2011 Apr 1;50(10):1413-6. doi: 10.1364/AO.50.001413.
7
Absolute distance measurement using sinusoidal phase modulating frequency sweeping interferometry with a reference interferometer.使用带有参考干涉仪的正弦相位调制频率扫描干涉术进行绝对距离测量。
Opt Express. 2022 Oct 10;30(21):38880-38895. doi: 10.1364/OE.463472.
8
Real-time phase delay compensation of PGC demodulation in sinusoidal phase-modulation interferometer for nanometer displacement measurement.用于纳米位移测量的正弦相位调制干涉仪中PGC解调的实时相位延迟补偿
Opt Express. 2017 Jan 9;25(1):472-485. doi: 10.1364/OE.25.000472.
9
Displacement measurement using a wavelength-phase-shifting grating interferometer.使用波长相移光栅干涉仪进行位移测量。
Opt Express. 2013 Oct 21;21(21):25553-64. doi: 10.1364/OE.21.025553.
10
Phase modulation depth setting technique of a phase-generated-carrier under AOIM in fiber-optic interferometer with laser frequency modulation.基于激光频率调制的光纤干涉仪中声光强度调制下相位载波的相位调制深度设置技术
Opt Express. 2020 Oct 12;28(21):31700-31713. doi: 10.1364/OE.403448.

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A Novel Method for Detecting Fe at a Micromolar Concentration Based on Multiple Self-Mixing Interference Using a Fiber Laser.基于光纤激光器的多重自混合干涉检测微摩尔浓度 Fe 的新方法。
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