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阳极溅射沉积Al-Ta合金过程中氮掺入的光电化学证据。

Photoelectrochemical evidence of nitrogen incorporation during anodizing sputtering--deposited Al-Ta alloys.

作者信息

Zaffora A, Santamaria M, Di Franco F, Habazaki H, Di Quarto F

机构信息

Electrochemical Materials Science Laboratory, DICAM, Università di Palermo, Viale delle Scienze, Ed. 6, Palermo, Italy.

出版信息

Phys Chem Chem Phys. 2016 Jan 7;18(1):351-60. doi: 10.1039/c5cp04347f. Epub 2015 Nov 30.

Abstract

Anodic films were grown to 20 V on sputtering-deposited Al-Ta alloys in ammonium biborate and borate buffer solutions. According to glow discharge optical emission spectroscopy, anodizing in ammonium containing solution leads to the formation of N containing anodic layers. Impedance measurements did not evidence significant differences between the dielectric properties of the anodic films as a function of the anodizing electrolyte. Photoelectrochemical investigation allowed evidencing that N incorporation induces a red-shift in the light absorption threshold of the films due to the formation of allowed localized states inside their mobility gap. The estimated Fowler threshold for the internal photoemission processes of electrons resulted to be independent of the anodizing electrolyte confirming that N incorporation does not appreciably affect the density of states distribution close to the conduction band mobility edge. The transport of photogenerated carriers has been rationalized according to the Pai-Enck model of geminate recombination.

摘要

在硼酸氢铵和硼酸盐缓冲溶液中,在溅射沉积的Al-Ta合金上施加20 V电压生长阳极氧化膜。根据辉光放电光发射光谱,在含铵溶液中进行阳极氧化会导致形成含氮阳极层。阻抗测量结果表明,阳极氧化膜的介电性能随阳极氧化电解液的变化没有显著差异。光电化学研究表明,由于在薄膜的迁移率间隙内形成了允许的局域态,氮的掺入导致薄膜的光吸收阈值发生红移。电子内部光发射过程的估计福勒阈值与阳极氧化电解液无关,这证实了氮的掺入不会明显影响导带迁移率边缘附近的态密度分布。根据双生复合的Pai-Enck模型,对光生载流子的传输进行了合理化解释。

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