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阳极氧化浴成分对阳极Ta-Nb混合氧化物电子性能的影响

The Effect of Anodizing Bath Composition on the Electronic Properties of Anodic Ta-Nb Mixed Oxides.

作者信息

Tranchida Giada, Zaffora Andrea, Di Franco Francesco, Santamaria Monica

机构信息

Department of Engineering, University of Palermo, Viale delle Scienze, 90128 Palermo, Italy.

出版信息

Nanomaterials (Basel). 2022 Dec 14;12(24):4439. doi: 10.3390/nano12244439.

Abstract

Anodic oxides were grown to 50 V on Ta-Nb sputtering deposited alloys, with high Nb content, in acetate ions containing an aqueous solution to study the effect of the anodizing bath composition on anodic layers' dielectric properties. Photoelectrochemical measurements proved the presence of a photocurrent in the band gap of photon energy lower than oxides, due to optical transitions involving localized electronic states as a consequence of acetate ions incorporation. Flat band potential value estimates assessed the insulating nature of the anodic oxides grown in the acetate buffer solution. Differential capacitance measurements showed that the highest capacitance value was measured for the sample grown on Ta-66%Nb. This capacitance value was higher with respect to those estimated for pure Ta and pure Nb anodic layers and with respect to the same alloy anodized in NaOH solution, i.e., acetate-free anodizing bath.

摘要

在含有醋酸根离子的水溶液中,对通过溅射沉积的高铌含量Ta-Nb合金进行阳极氧化,使其电压达到50V,以研究阳极氧化浴组成对阳极层介电性能的影响。光电化学测量证明,由于醋酸根离子的掺入导致涉及局域电子态的光学跃迁,在光子能量低于氧化物的带隙中存在光电流。平带电位值估计评估了在醋酸盐缓冲溶液中生长的阳极氧化物的绝缘性质。微分电容测量表明,在Ta-66%Nb上生长的样品测得的电容值最高。相对于纯Ta和纯Nb阳极层以及在无醋酸根的阳极氧化浴(即NaOH溶液)中阳极氧化的同一合金所估计的电容值,该电容值更高。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/651f/9781357/bf1ec206ba17/nanomaterials-12-04439-g001.jpg

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