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在硅基片顶部对铜纳米颗粒进行激光烧结。

Laser sintering of copper nanoparticles on top of silicon substrates.

作者信息

Soltani A, Khorramdel Vahed B, Mardoukhi A, Mäntysalo M

机构信息

Department of Electronics and Communication Engineering, Tampere University of Technology, Tampere, 3720, Finland.

出版信息

Nanotechnology. 2016 Jan 22;27(3):035203. doi: 10.1088/0957-4484/27/3/035203. Epub 2015 Dec 9.

DOI:10.1088/0957-4484/27/3/035203
PMID:26650565
Abstract

This study examines the sintering of inkjet printed nanoparticle copper ink in a room environment using a laser as a high speed sintering method. Printed patterns were sintered with increasing laser scanning speed up to 400 mm s(-1). The resistivities of the sintered structures were measured and plotted against the scanning speeds. Increased resistivity seems to correlate with increased scanning speed. A selections of analytical methods was used to study the differences in microstructure and composition of the sintered structures. Based on the results, no discernable difference in the microstructure was noticed between the structures sintered using 20 mm s(-1) to 400 mm s(-1) scanning speeds; only the structure scanned using 5 mm s(-1) speed showed a vastly different microstructure and no resistivity was measurable on this structure. Compositional studies revealed that, apart from the structure scanned with 5 mm s(-1) speed which contained the highest oxygen, the rest of the structures showed a steady oxygen increase with increased scanning speed.

摘要

本研究考察了在室内环境中使用激光作为高速烧结方法对喷墨打印的纳米颗粒铜墨水进行烧结的情况。以高达400 mm s(-1)的递增激光扫描速度对打印图案进行烧结。测量烧结结构的电阻率,并将其与扫描速度作图。电阻率的增加似乎与扫描速度的增加相关。使用一系列分析方法来研究烧结结构在微观结构和成分上的差异。基于这些结果,在20 mm s(-1)至400 mm s(-1)扫描速度下烧结的结构之间未观察到微观结构有明显差异;只有以5 mm s(-1)速度扫描的结构显示出截然不同的微观结构,并且该结构无法测量电阻率。成分研究表明,除了以5 mm s(-1)速度扫描的结构含氧量最高外,其余结构的含氧量随扫描速度的增加而稳步上升。

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