基于双亚波长光栅反射器的高分辨率片上光学滤波器阵列

High resolution on-chip optical filter array based on double subwavelength grating reflectors.

作者信息

Horie Yu, Arbabi Amir, Han Seunghoon, Faraon Andrei

出版信息

Opt Express. 2015 Nov 16;23(23):29848-54. doi: 10.1364/OE.23.029848.

DOI:10.1364/OE.23.029848

Abstract

An optical filter array consisting of vertical narrow-band Fabry-Pérot (FP) resonators formed by two highly reflective high contrast subwavelength grating mirrors is reported. The filters are designed to cover a wide range of operation wavelengths (Δλ/λ = 5%) just by changing the in-plane grating parameters while the device thickness is maintained constant. Operation in the telecom band with transmission efficiencies greater than 40% and quality factors greater than 1,000 are measured experimentally for filters fabricated on the same substrate.

摘要

报道了一种由两个高反射高对比度亚波长光栅镜形成的垂直窄带法布里-珀罗（FP）谐振器组成的光学滤波器阵列。这些滤波器设计为仅通过改变面内光栅参数就能覆盖很宽的工作波长范围（Δλ/λ = 5%），同时保持器件厚度不变。对于在同一衬底上制造的滤波器，实验测量了其在电信波段的传输效率大于40%且品质因数大于1000的工作情况。