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用于移动应用的紧凑型超光谱图像传感器。

Compact meta-spectral image sensor for mobile applications.

作者信息

Lee Jaesoong, Park Yeonsang, Kim Hyochul, Yoon Young-Zoon, Ko Woong, Bae Kideock, Lee Jeong-Yub, Choo Hyuck, Roh Young-Geun

机构信息

Photonic Device Lab., Samsung Advanced Institute of Technology, 130 Samsung-ro, 16678, Suwon, Korea.

Department of Physics, Chungnam National University, 99 Daehak-ro, 34314, Daejeon, Korea.

出版信息

Nanophotonics. 2022 Jan 14;11(11):2563-2569. doi: 10.1515/nanoph-2021-0706. eCollection 2022 Jun.

Abstract

We have demonstrated a compact and efficient metasurface-based spectral imager for use in the near-infrared range. The spectral imager was created by fabricating dielectric multilayer filters directly on top of the CMOS image sensor. The transmission wavelength for each spectral channel was selected by embedding a Si nanopost array of appropriate dimensions within the multilayers on the corresponding pixels, and this greatly simplified the fabrication process by avoiding the variation of the multilayer-film thicknesses. The meta-spectral imager shows high efficiency and excellent spectral resolution up to 2.0 nm in the near-infrared region. Using the spectral imager, we were able to measure the broad spectra of LED emission and obtain hyperspectral images from wavelength-mixed images. This approach provides ease of fabrication, miniaturization, low crosstalk, high spectral resolution, and high transmission. Our findings can potentially be used in integrating a compact spectral imager in smartphones for diverse applications.

摘要

我们展示了一种紧凑高效的基于超表面的光谱成像仪,用于近红外波段。该光谱成像仪是通过在CMOS图像传感器顶部直接制造介质多层滤光片而制成的。通过在相应像素的多层结构中嵌入尺寸合适的硅纳米柱阵列来选择每个光谱通道的传输波长,这通过避免多层膜厚度的变化大大简化了制造过程。该超光谱成像仪在近红外区域显示出高效率和高达2.0纳米的出色光谱分辨率。使用该光谱成像仪,我们能够测量发光二极管发射的宽光谱,并从波长混合图像中获取高光谱图像。这种方法具有易于制造、小型化、低串扰、高光谱分辨率和高透射率的特点。我们的研究结果有可能用于在智能手机中集成紧凑的光谱成像仪,以实现多种应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27e3/11501992/96311d917ef9/j_nanoph-2021-0706_fig_001.jpg

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