Kim Yangjin, Hibino Kenichi, Sugita Naohiko, Mitsuishi Mamoru
Opt Express. 2015 Dec 14;23(25):32869-80. doi: 10.1364/OE.23.032869.
In this study, a 6N - 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate with suppression of the coupling errors between the higher harmonics and phase shift error. The characteristics of the 6N - 5 algorithm were estimated by connection with the Fourier representation in the frequency domain. The phase error of the measurements performed using the 6N - 5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N - 5 algorithm and a wavelength tuning interferometer.
在本研究中，开发了一种包含多项式窗函数和离散傅里叶变换的6N - 5相移算法，用于同时测量透明板的表面形状和光学厚度，并抑制高次谐波之间的耦合误差和相移误差。通过与频域中的傅里叶表示相关联来估计6N - 5算法的特性。讨论了使用6N - 5算法进行测量的相位误差，并与使用其他算法获得的测量结果进行了比较。最后，使用6N - 5算法和波长调谐干涉仪同时测量了透明板的表面形状和光学厚度。
